A VCO-Based CMOS Readout Circuit for Capacitive MEMS Microphones
نویسندگان
چکیده
منابع مشابه
Design of Cmos Readout Frontend Circuit for Mems Capacitive Microphones
This paper deals with a frontend part of the readout circuit developed as an integrated circuit that after bonding together with a MEMS capacitive microphone (MCM) chip will be used in a noise dosimeter applicable in very noisy and harsh environment, e.g. mine. Therefore, the main attention has been paid to the high dynamic range, low offset and low noise of the developed readout interface as w...
متن کاملCmos Readout Interfaces for Mems Capacitive Microphones
This dissertation demonstrates the feasibility of three novel low-power and low-noise schemes for the readout interfaces of MEMS Capacitive Microphones (MCM) by presenting their detailed design descriptions and measurement results as application-specific ICs (ASIC) in CMOS technology developed to exploit their application scope in consumer electronics and hearing aids. MCMs are a new generation...
متن کاملDesign of Low Noise Readout Amplifiers for Monolithic Capacitive CMOS-MEMS Accelerometers
This thesis report describes the design process, the implementation and the simulation and measurement results of two different readout circuits to be used with two monolithic MEMS accelerometers fabricated by post-CMOS surface micromachining based on isotropic wet etching in IHP SiGe 0,25 μm technology. The first design is used with a 50 fF z-axis sensor and the second design with a 200 fF sen...
متن کاملA Cmos Mems Capacitive Differential Flow Sensor for Respiratory Monitoring
This work presents a CMOS (complementary metal oxide semiconductor) micromachined capacitive differential flow sensor for respiratory monitoring. Airflow induces a pressure change on the suspended sensing plate and causes a capacitance change with respect to the electrodes. The microstructure fabricated by post-CMOS metal etch occupies an area of 320 × 230 m and has differential sensing capaci...
متن کاملChopper Stabilized, Low-Power, Low-Noise, Front End Interface Circuit for Capacitive CMOS MEMS Sensor Applications
In this paper, a chopper stabilized fully differential CMOS pre-amplifier circuit is presented. The proposed circuit is designed for sub-atto Farad capacitive CMOS MEMS sensing applications. Chopper stabilization technique is employed to minimize flicker (1/f) noise and offsets in the circuit. The proposed circuit is designed using MIMOS 0.35 μm AMS CMOS 3.3 V technology and simulation results ...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Sensors
سال: 2019
ISSN: 1424-8220
DOI: 10.3390/s19194126